Small angle X-ray scattering measurements of porous low-k films using synchrotron radiation

Synchrotron radiation has been employed to analyze the difference in three representative kinds of spin on glass (SOG) films systematically based on a small angle X-ray scattering (SAXS) technique. The amount of scattering by pores in a SOG film of organic non-template type was found to be extremely smaller than that in low-k films of a template type. The pore size in the organic non-template type SOG film was estimated to be smaller than that of the template type low-k films. A position annihilation lifetime spectroscopy was also applied to confirm the SAXS results. It was found that the consideration of properties of specific low-k films and a scanning strategy in SAXS measurements were important for evaluating the pores of low-k films