Published May 2006 | Version v1
Journal article

Relaxed state of Ge xSi1-x islands embedded in Si

  • 1. CNR - INFM - OGG, c/o European Synchrotron Radiation Facility, GILDA CRG, 6, Rue Jules Horowitz, B.P. 220, F-38043 Grenoble (France)
  • 2. Univ. Roma Tre, Via della Vasca Navale 84, I-00146 Rome (Italy)

Description

The process of capping Ge islands with Si overlayers is known to have a strong influence on their composition and shape. In this work we have investigated Ge islands on Si produced by chemical vapor deposition covered with Si layers of different thickness. The structural characterization was carried out by X-ray absorption spectroscopy at the Ge-K edge. A noticeable Si uptake by the islands is evident upon capping. Bond length for the first three shells have been analyzed by comparison with models based on the valence force field method. The results evidence that the islands have, on the average, a relaxed state with presumably strained parts in contact with the Si matrix

Additional details

Identifiers

DOI
10.1016/j.nimb.2005.12.016;
PII
S0168-583X(05)02132-4;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
246
Journal Issue
1
Journal Page Range
p. 64-68
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
Synchrotron radiation and materials science
Acronym
E-MRS 2005, Symposium O
Dates
31 May - 3 Jun 2005
Place
Strasbourg (France)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37072832
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ABSORPTION SPECTROSCOPY; BOND LENGTHS; CHEMICAL VAPOR DEPOSITION; GERMANIUM SILICIDES; LAYERS; NANOSTRUCTURES; PARTICLES; SHAPE; SHELLS; STRAINS; THICKNESS; X-RAY SPECTROSCOPY
Descriptors DEC
CHEMICAL COATING; DEPOSITION; DIMENSIONS; GERMANIUM COMPOUNDS; LENGTH; SILICIDES; SILICON COMPOUNDS; SPECTROSCOPY; SURFACE COATING

Optional Information

Copyright
Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.