Fabrication of submicron conducting and chemically functionalized structures from poly(3-octylthiophene) by an electron beam
- 1. Univ. of Oregon, Eugene (United States)
Description
The authors present a novel method of using an electron beam to both functionalize and cross-link poly (3-octylthiophene) (P3OT) in a single step to produce submicron scale polymer structures carrying functionalized groups. P3OT is shown to be a negative electron-beam resist with a sensitivity of 15-30 μC cm-2.The electrical conductivity of doped P3OT wire structures was measured at room temperature and was found to be in the range 4.0-5.9 Ω-1 cm-1. Electron-beam exposure of P3OT films containing 7 wt % of N-hydroxysuccinimide (NHS) functionalized perfluorophenyl azide 2 resulted in the incorporation of the NHS functional groups in the polymer, as well as cross-linking. The functionalized submicron structures were found to be weakly fluorescent under fluorescein excitation (450-490 nm), but after treatment with a solution of 5-(aminoacetamido)fluorescein in ethanol the structures became strongly fluorescent. 27 refs., 3 figs
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
- Journal Volume
- 10
- Journal Issue
- 6
- Journal Page Range
- p. 2589-2592.
- ISSN
- 0734-211X
- CODEN
- JVTBD9
Conference
- Title
- Symposium on electron, ion and photon beams.
- Dates
- 26-29 May 1992.
- Place
- Orlando, FL (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 24068951
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CROSS-LINKING; DOPED MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRON BEAM MACHINING; FABRICATION; FILMS; FLUORESCENCE; HETEROCYCLIC COMPOUNDS; MICROSTRUCTURE; ORGANIC SULFUR COMPOUNDS; POLYMERS; THIOPHENE
- Descriptors DEC
- CHEMICAL REACTIONS; CRYSTAL STRUCTURE; ELECTRICAL PROPERTIES; EMISSION; LUMINESCENCE; MACHINING; MATERIALS; ORGANIC COMPOUNDS; PHOTON EMISSION; PHYSICAL PROPERTIES; POLYMERIZATION
Optional Information
- Secondary number(s)
- CONF-920575--.