Published November 1992 | Version v1
Journal article

Fabrication of submicron conducting and chemically functionalized structures from poly(3-octylthiophene) by an electron beam

  • 1. Univ. of Oregon, Eugene (United States)

Description

The authors present a novel method of using an electron beam to both functionalize and cross-link poly (3-octylthiophene) (P3OT) in a single step to produce submicron scale polymer structures carrying functionalized groups. P3OT is shown to be a negative electron-beam resist with a sensitivity of 15-30 μC cm-2.The electrical conductivity of doped P3OT wire structures was measured at room temperature and was found to be in the range 4.0-5.9 Ω-1 cm-1. Electron-beam exposure of P3OT films containing 7 wt % of N-hydroxysuccinimide (NHS) functionalized perfluorophenyl azide 2 resulted in the incorporation of the NHS functional groups in the polymer, as well as cross-linking. The functionalized submicron structures were found to be weakly fluorescent under fluorescein excitation (450-490 nm), but after treatment with a solution of 5-(aminoacetamido)fluorescein in ethanol the structures became strongly fluorescent. 27 refs., 3 figs

Additional details

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
Journal Volume
10
Journal Issue
6
Journal Page Range
p. 2589-2592.
ISSN
0734-211X
CODEN
JVTBD9

Conference

Title
Symposium on electron, ion and photon beams.
Dates
26-29 May 1992.
Place
Orlando, FL (United States).

Optional Information

Secondary number(s)
CONF-920575--.