Published January 2008 | Version v1
Journal article

Fabrication optimization of a micro-spherical fiber probe with the Taguchi method

  • 1. School of Precision Instruments, Hefei University of Technology, Tunxi Road 193, Hefei, Anhui (China)
  • 2. Department of Electronical Engineering, Northern Taiwan Institute of Science and Technology, (112) 2, Xue Yuan Road, Beitou Taipei, Taiwan (China)

Description

This paper describes a low-cost and efficient method to fabricate a micro-spherical fiber probe using a commercial fiber fusion splicer based on the Taguchi method. Based on the principles of electric arc discharging energy absorption and the surface tension phenomenon, a microsphere can be formed at the end of the optical glass fiber. The optimum parameters to control the geometrical accuracy of the probe were selected according to the Taguchi method with the signal-to-noise ratio and the analysis of variance processes. From the results, a spherical probe about 310 µm in diameter with less than 1 µm in roundness error could be produced using a 125 µm diameter single-mode optical fiber. The offset distance between the ball center and the fiber stylus central line due to the gravity effect could also be controlled to less than 1 µm after optimization of the parameters. The microprobe can be used for the contact-type stylus head to enhance the resolution and extend the capability of measuring meso- to micro-objects

Availability note (English)

Available from http://dx.doi.org/10.1088/0960-1317/18/1/015011

Additional details

Identifiers

DOI
10.1088/0960-1317/18/1/015011;
PII
S0960-1317(08)59231-X;

Publishing Information

Journal Title
Journal of Micromechanics and Microengineering. Structures, Devices and Systems
Journal Volume
18
Journal Issue
1
Journal Page Range
[8 p.]
ISSN
0960-1317
CODEN
JMMIEZ