Published 1991 | Version v1
Book Metadata-only

The deposition of nickel boride thin films by borane and metallaborane cluster compounds

Creators

  • 1. Syracuse Univ., NY (United States). Dept. of Chemistry
  • 2. Syracuse Univ., NY (United States). Dept. of Physics

Description

This paper reports on the deposition of high purity and controlled stoichiometry metal boride thin-film materials. Borane clusters and their corresponding metal complexes are currently being investigated in our laboratories for their utility as unique source materials for the formation of metallic-boride thin films by MOCVD. Variable composition nickel boride thin films ranging from 0.1 micron to several microns have been prepared. These new materials have been characterized by SEM, AES, and XES. The magnetic properties of these new films have been investigated with torque magnetometry and magneto-optic Kerr effect magnetometry

Additional details

Publishing Information

Publisher
Materials Research Society.
Imprint Place
Pittsburgh, PA (United States)
ISBN
1-55899-096-8
Imprint Title
Chemical perspectives of microelectronic materials. 2
Imprint Pagination
584 p.
Journal Page Range
p. 439-441.

Conference

Title
Fall meeting of the Materials Research Society (MRS).
Dates
24 Nov - 1 Dec 1990.
Place
Boston, MA (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
23041885
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; FABRICATION; KERR EFFECT; MAGNETIC PROPERTIES; NICKEL BORIDES; ORGANOMETALLIC COMPOUNDS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X-RAY SPECTRA
Descriptors DEC
BORIDES; BORON COMPOUNDS; CHEMICAL COATING; DEPOSITION; DIELECTRIC PROPERTIES; ELECTRICAL PROPERTIES; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; FILMS; MICROSCOPY; NICKEL COMPOUNDS; ORGANIC COMPOUNDS; PHYSICAL PROPERTIES; SPECTRA; SPECTROSCOPY; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS

Optional Information

Funding organization
National Science Foundation, Washington, DC (United States).
Secondary number(s)
CONF-901105--.