Published 1983
| Version v1
Miscellaneous
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Low dose sputtering experiments
Description
Sputtering yields are function not only of the species and energy of the projectile and of initial target material but also of dose. He+ ions were used on a nickel and a metal glass surface respectively. An interpretation of the data is also given. (G.Q.)
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Additional details
Publishing Information
- Imprint Title
- 3S'83 Symposium on Surface Science. Contributions
- Imprint Pagination
- 319 p.
- Journal Page Range
- p. 115-119.
- Report number
- INIS-mf--8901
Conference
- Title
- 3S'83 Symposium on surface science.
- Dates
- 31 Jan - 4 Feb 1983.
- Place
- Obertraun (Austria).
INIS
- Country of Publication
- Austria
- Country of Input or Organization
- Austria
- INIS RN
- 15000191
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- GLASS; HELIUM IONS; KEV RANGE 01-10; KEV RANGE 10-100; METALS; NICKEL; SPUTTERING; SURFACE PROPERTIES
- Descriptors DEC
- CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; TRANSITION ELEMENTS