Published August 2003 | Version v1
Journal article Metadata-only

XPS study of hydrogen permeation effect on SiC-C films

Creators

Description

70%SiC-C films were deposited with r.f. magnetron sputtering on stainless steel substrates followed by ion beam mixing. These films were permeated by hydrogen gas under the pressure of 3.23 x 107 Pa for 3 h at 500 K. X-ray photoelectron spectroscopy was used to analyze the chemical bonding states of C and Si in these 70%SiC-C films before and after hydrogen gas permeation. In addition, chemical states of contaminated oxygen were also checked. The effect of hydrogen permeation on those states in the 70%SiC-C films is discussed in this paper

Additional details

Identifiers

PII
S0168583X03009637;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
207
Journal Issue
4
Journal Page Range
p. 395-401
ISSN
0168-583X
CODEN
NIMBEU

INIS

Country of Publication
Netherlands
Country of Input or Organization
Mexico
INIS RN
35042789
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
BINDING ENERGY; CARBON; CHEMICAL STATE; EV RANGE; HYDROGEN; ION BEAMS; MAGNETRONS; PHOTOELECTRON SPECTROSCOPY; PRESSURE DEPENDENCE; RF SYSTEMS; SILICON CARBIDES; SPUTTERING; STAINLESS STEELS; SUBSTRATES; TEMPERATURE DEPENDENCE
Descriptors DEC
ALLOYS; BEAMS; CARBIDES; CARBON ADDITIONS; CARBON COMPOUNDS; ELECTRON SPECTROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; ENERGY; ENERGY RANGE; EQUIPMENT; HIGH ALLOY STEELS; IRON ALLOYS; IRON BASE ALLOYS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NONMETALS; SILICON COMPOUNDS; SPECTROSCOPY; STEELS; TRANSITION ELEMENT ALLOYS

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Copyright
Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.