Published 1998 | Version v1
Miscellaneous Metadata-only

Ion beam applications in silicidation processes of Si1-xGex layers

Creators

Description

no abstract available

Availability note (English)

Available from British Library Document Supply Centre- DSC:DXN021586

Additional details

Publishing Information

Imprint Pagination
[vp.]

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
31046828
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Thesis, Non-conventional Literature, No Abstract
Descriptors DEI
GERMANIUM; ION BEAMS; LAYERS; SILICON
Descriptors DEC
BEAMS; ELEMENTS; METALS; SEMIMETALS