Volume coupling effect on threshold energy values of solids sputtering cascades

Analysis of Jamamura-Bogdanski model is conducted for determination of solid body sputtering effective threshold energies, which demonstrates the presence of a systematic error in the theory. An assumption is made that divergence between theory and experiment is explained by inelastic energy losses, caused by the rupture of volumetric atom bonds. A formulae for determining the threshold energies of different sputtering cascades is derived. Comparison of sputtering cascade threshold energy dependences, calculated using an improved model, demonstrates a good agreement of theory experiment. 7 refs.; 2 figs