Scan-free grazing emission XRF measurements in the laboratory using a CCD

The rapid development of new classes of nanomaterials calls for easy access methods in order to quantify properties essential for their functionality, e.g., interdiffusion of elements at interfaces, or elemental dopant, or depth profiles. Non-destructive methods, like X-ray fluorescence (XRF), are of special interest, for preserving materials and offering the possibility to incorporate the analysis in a production process. In-depth XRF methods for the characterization of nanomaterials are up until now limited to synchrotron radiation facilities. A novel scan-free grazing emission XRF (GEXRF) setup is presented utilizing conventional and low-cost hardware, acting as a transfer of a synchrotron method into the laboratory. A chromium target X-ray tube with a polycapillary lens is used as X-ray source and a conventional CCD as the 2D energy-dispersive detector. To confirm the feasibility of the described setup a nanometer-layered titanium-aluminium sample is measured. An energy-dispersive spectrum is obtained in single-photon-counting-mode from the CCD measurements and first GEXRF profiles generated. A semi-quantitative evaluation of this setup is implemented by comparing the measured results with simulations, allowing conclusions about the investigated samples' elemental, compositional, and structural layer-by-layer characteristics. (copyright 2017 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)