Published 2000
| Version v1
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Thermoimplantation modification of elastic-stressed GexSi1-x/Si targets with exception of generation of dislocation structure in them
Creators
- 1. MIFI, Moscow (Russian Federation)
- 2. IPTM RAN, Chernogolovka, Moskovskaya Oblast' (Russian Federation)
- 3. Surrey Univ., Surrey (United Kingdom)
Description
no abstract available
Files
34047577.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Термоимплантационная модификация упруго-напряженных эпитаксиальных мишеней Ге
Publishing Information
- Publisher
- MGU
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Theses of reports of the 30. International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 162 p.
- Journal Page Range
- p. 131
- Report number
- INIS-RU--460
Conference
- Title
- 30. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- 30. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2000
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 34047577
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- DISLOCATIONS; EQUILIBRIUM; GERMANIUM SILICIDES; ION CHANNELING; ION IMPLANTATION; KEV RANGE 100-1000; MOLECULAR BEAM EPITAXY; SILICON IONS; STRESS RELAXATION; TARGETS; TEMPERATURE RANGE 0400-1000 K; THERMODYNAMIC PROPERTIES; THIN FILMS; VACANCIES; X-RAY DIFFRACTION
- Descriptors DEC
- CHANNELING; CHARGED PARTICLES; COHERENT SCATTERING; CRYSTAL DEFECTS; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; DIFFRACTION; ENERGY RANGE; EPITAXY; FILMS; GERMANIUM COMPOUNDS; IONS; KEV RANGE; LINE DEFECTS; PHYSICAL PROPERTIES; POINT DEFECTS; RELAXATION; SCATTERING; SILICIDES; SILICON COMPOUNDS; TEMPERATURE RANGE
Optional Information
- Notes
- Imprint:Tezisy dokladov 30. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami