Published July 1991
| Version v1
Journal article
Atomic size effect on the formation of ionized cluster beam epitaxy in Lennard-Jones systems
Creators
- 1. Dept. of Materials Science and Engineering, Univ. of Illinois, Urbana (USA)
Description
Ionized cluster beam deposition is studied by molecular dynamics simulations in which the atomic size of incident cluster atoms is different from the size of substrate atoms. Lennard-Jones interatomic potentials are used for the two-component system. The results provide the morphologies of the overlayers for various atomic sizes and are compared to simulation results of molecular beam epitaxy. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research, Section B
- Journal Volume
- 59/60
- Journal Issue
- pt.1
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 203-206
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 7. international conference on ion beam modification of materials (IBMM-7) and exposition.
- Dates
- 9-14 Sep 1990.
- Place
- Knoxville, TN (United States).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 23000348
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM DYNAMICS; CLUSTER BEAMS; COMPUTERIZED SIMULATION; DISTRIBUTION FUNCTIONS; EPITAXY; INTERATOMIC FORCES; ION BEAMS; LENNARD-JONES POTENTIAL; SUBSTRATES
- Descriptors DEC
- BEAMS; DYNAMICS; MECHANICS; POTENTIALS; SIMULATION