Published April 1989 | Version v1
Miscellaneous Metadata-only

Vapor deposition of silicon nitride powders suitable for sintering

Creators

Description

Sinteractive silicon nitride powders have been synthesized in a thermal RF-Plasma and the influence of various reactants and processing parameters on the powder characteristics has been investigated. A plasma unit, consisting of a plasma torch, a reaction unit, a quenching chamber and a complete supply system has been designed and constructed. The unit is designed for an output of 100 g/h; the feed material can be gaseous, liquid or solid. Powders were synthesized from SiH4-NH3, SiCl4-NH3 and Si-NH3. The powder characteristics including their sintering behaviour were determined. After a heat treatment, optimized powders could be sintered to >95% th. d. despite a low green density of the compacted powder. (orig.) With 66 refs., 25 tabs., 72 figs

Availability note (English)

Copy held by UB/TIB Hannover.

Abstract (German)

Ziel des Forschungsvorhabens war die Untersuchung des Einflusses verschiedener Ausgangssubstanzen und Prozessparameter bei der Synthese von sinterfaehigen Siliciumnitridpulvern im thermischen, induktiven Plasma. Eine Plasmaapparatur bestehend aus Plasmabrenner, Reaktionsduese und Quencher, sowie der kompletten Versorgungstechnik wurde konzipiert und aufgebaut. Die Anlage ist fuer eine Produktrate von 100 g/h ausgelegt und die Rohstoffe koennen fest, fluessig oder gasfoermig zugefuehrt werden. Pulverabscheidungen aus den Systemen SiH4-NH3, SiCl4-NH3 und Si-NH3 wurden durchgefuehrt und die anfallenden Pulver einer umfangreichen Pulvercharakterisierung unterzogen. Optimierte Pulver liessen sich nach einer Gluehbehandlung trotz geringer Gruendichten auf Sinterdichten >95% verdichten. (orig.) With 66 refs., 25 tabs., 72 figs

Additional details

Additional titles

Subtitle (English)
Final report
Original title (German)
Gasphasenabscheidung von Siliciumnitrid-Sinterpulvern
Original subtitle (German)
Abschlussbericht.

Publishing Information

Imprint Pagination
114 p.

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
21013614
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
AMMONIA; CHEMICAL VAPOR DEPOSITION; PLASMA; POWDERS; SILANES; SILICON; SILICON CHLORIDES; SILICON NITRIDES; SYNTHESIS
Descriptors DEC
CHEMICAL COATING; CHLORIDES; CHLORINE COMPOUNDS; DEPOSITION; ELEMENTS; HALIDES; HALOGEN COMPOUNDS; HYDRIDES; HYDROGEN COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; NITROGEN HYDRIDES; PNICTIDES; POLAR SOLVENTS; SEMIMETALS; SILICON COMPOUNDS; SOLVENTS; SURFACE COATING

Optional Information

Contract/Grant/Project number
Contract BMFT 03 ZC 203 2