Published April 14, 2008 | Version v1
Journal article Metadata-only

Tin laser-produced plasma source modeling at 13.5 nm for extreme ultraviolet lithography

Creators

  • 1. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
  • 2. EPPRA SAS, Villebon sur Yvette 91140 (France)
  • 3. Keldysh Institute of Applied Mathematics RAS, Moscow 125047 (Russian Federation)
  • 4. Institute of Laser Engineering, Osaka University, 2-6 Yamada-Oka, Suita, Osaka 565-0871 (Japan)

Description

Extreme ultraviolet lithography semiconductor manufacturing requires a 13.5 nm light source. Laser-produced plasma emission from Sn V-Sn XIV ions is one proposed industry solution. The effect of laser pulse width and spatial profile on conversion efficiency is analyzed over a range of power densities using a two-dimensional radiative magnetohydrodynamic code and compared to experiment using a 1.064 μm, neodymium:yttrium aluminium garnet laser on a planar tin target. The calculated and experimental conversion efficiencies and the effects of self-absorption in the plasma edge are compared. Best agreement between theory and experiment is found for an 8.0 ns Gaussian pulse

Additional details

Identifiers

DOI
10.1063/1.2906901;

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
92
Journal Issue
15
Journal Page Range
p. 151501-151501.3
ISSN
0003-6951
CODEN
APPLAB

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39112186
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
ALUMINIUM OXIDES; EMISSION; EXTREME ULTRAVIOLET RADIATION; FERRITE GARNETS; LASER-PRODUCED PLASMA; LASERS; LIGHT SOURCES; MAGNETOHYDRODYNAMICS; NEODYMIUM; PLASMA PRODUCTION; POWER DENSITY; PULSES; SELF-ABSORPTION; SEMICONDUCTOR MATERIALS; SIMULATION; TIN; TWO-DIMENSIONAL CALCULATIONS; YTTRIUM COMPOUNDS
Descriptors DEC
ABSORPTION; ALUMINIUM COMPOUNDS; CHALCOGENIDES; ELECTROMAGNETIC RADIATION; ELEMENTS; FLUID MECHANICS; HYDRODYNAMICS; MATERIALS; MECHANICS; METALS; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PLASMA; RADIATION SOURCES; RADIATIONS; RARE EARTHS; SORPTION; TRANSITION ELEMENT COMPOUNDS; ULTRAVIOLET RADIATION

Optional Information

Notes
(c) 2008 American Institute of Physics