Published July 1990 | Version v1
Journal article

Modification of cobalt and iron silicides surfaces using low energy argon ions

Description

Using electron Auger spectroscopy, modification of single crystal surfaces of cobalt and iron silicides by argon ions in the 1-4 keV energy range is studied. The ratios of the sputtering coefficients of the components are determined

Additional details

Additional titles

Original title (Russian)
Модификация поверхности силицидов кобальта и железа ионами аргона низких энергий

Publishing Information

Journal Title
Izvestiya Akademii Nauk SSSR, Seriya Fizicheskaya
Journal Volume
54
Journal Issue
7
Series
Izv. Akad. Nauk SSSR, Ser. Fiz.
Journal Page Range
1298-1301
ISSN
0367-6765
CODEN
IANFA

Conference

Title
9. All-Union conference on interaction of atomic particles with solids.
Dates
11-13 Oct 1989.
Place
Moscow (USSR).

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
22059605
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON IONS; CHEMICAL COMPOSITION; COBALT SILICIDES; EV RANGE 100-1000; IRON SILICIDES; KEV RANGE 01-10; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; SPUTTERING
Descriptors DEC
CHARGED PARTICLES; COBALT COMPOUNDS; CRYSTALS; ENERGY RANGE; EV RANGE; IONS; IRON COMPOUNDS; KEV RANGE; RADIATION EFFECTS; SILICIDES; SILICON COMPOUNDS; TRANSITION ELEMENT COMPOUNDS