Analysis of the interaction between low energy light ions and solid atoms by Monte Carlo simulation

A Monte Carlo simulation has been applied to the analysis of the transmitted or reflected energy distribution and the ion or damage range profile when light ions, such as protons, deuterons and helium ions, of low energy impinge on solids. The model is based on the binary elastic and inelastic collisions, in which the power potential is adopted. The influence of the discontinuous energy loss due to the inelastic collision sequence and the potential form on this analysis has been studied. (auth.)