Heavy-ion Rutherford backscattering spectrometry

The Rutherford backscattering spectrometry was examined with 11B and 4He ions. Backscattering spectra improve in the mass resolution, the depth resolution and the channeling minimum yield when 6 MeV 11B ions are used instead of 2 MeV 4He ions, which have been used commonly. Then the terminal voltage of a 1.7 MV tandem Cockcroft-Walton accelerator was calibrated by means of a combination of the 27Al(p, γ)28Si resonance method and a new iterative method using 1H and 4He ions. The true terminal voltage of the accelerator is lower than the corresponding nominal values, and the deviation quadratically increases with increasing voltage. (author)