Published August 1992
| Version v1
Journal article
Elastic recoil detection analysis of light elements in thin films using 35 MeV 35Cl6+ beam
Description
An elastic recoil detection analysis method is described using 35 MeV 35Cl as incident ions. This method can determine and profile simultaneously H, D, He, C and O or in the other case, H, C, N and O. The depth resolution for the elements heavier than He is better than 20 nm. It has been applied to study the Co/Si and TiN thin films, and the depth profiles of He implanted in monocrystal silicon
Additional details
Publishing Information
- Journal Title
- Nuclear Science and Techniques
- Journal Volume
- 3
- Journal Issue
- 3
- Journal Page Range
- p. 175-181.
- ISSN
- 1001-8042
- CODEN
- NSETEC
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 24056207
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- CARBON; CHLORINE 35 BEAMS; DEPTH; DEUTERIUM; ELASTICITY; HELIUM; HYDROGEN; ION SCATTERING ANALYSIS; MEV RANGE 10-100; MULTI-ELEMENT ANALYSIS; NITROGEN; RECOILS; SPATIAL RESOLUTION; THIN FILMS
- Descriptors DEC
- BEAMS; CHEMICAL ANALYSIS; DIMENSIONS; ELEMENTS; ENERGY RANGE; FILMS; HYDROGEN ISOTOPES; ION BEAMS; ISOTOPES; LIGHT NUCLEI; MECHANICAL PROPERTIES; MEV RANGE; NONDESTRUCTIVE ANALYSIS; NONMETALS; NUCLEI; ODD-ODD NUCLEI; RARE GASES; RESOLUTION; STABLE ISOTOPES