Published September 1, 2016 | Version v1
Journal article Metadata-only

PZT thin film deposition techniques, properties and its application in ultrasonic MEMS sensors: a review

Creators

  • 1. Department of Telecommunication Engineering, R. V. College of Engineering, Bengaluru (India)
  • 2. Department of Mechanical Engineering, Dayanandasagar University, Bengaluru (India)

Description

This paper describes an overview of the state of art in PbZrxTi1-xO3 (PZT)ferroelectric thin films and its applications in Micro Electro Mechanical Systems (MEMS). First, the deposition techniques and then the important properties of PZT films such as surface morphology polarization and ferroelectric properties are reviewed. Two major deposition techniques such as sol-gel and Magnetron sputtering are given and compared for the film surface morphology and ferroelectric properties. Finally, the application of PZT thin film in MEMS ultrasonic sensors is discussed. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1757-899X/149/1/012190

Additional details

Identifiers

DOI
10.1088/1757-899X/149/1/012190;

Publishing Information

Journal Title
IOP Conference Series. Materials Science and Engineering (Online)
Journal Volume
149
Journal Issue
1
Journal Page Range
[8 p.]
ISSN
1757-899X

Conference

Title
International conference on advances in materials and manufacturing applications
Acronym
IConAMMA-2016
Dates
14-16 Jul 2016
Place
Bangalore (India)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
49074252
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
COMPARATIVE EVALUATIONS; DEPOSITION; FERROELECTRIC MATERIALS; MAGNETRONS; MEMS; POLARIZATION; PZT; SENSORS; SOL-GEL PROCESS; SPUTTERING; SURFACES; THIN FILMS; ULTRASONIC WAVES
Descriptors DEC
DIELECTRIC MATERIALS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; EVALUATION; FILMS; LEAD COMPOUNDS; MATERIALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXYGEN COMPOUNDS; SOUND WAVES; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS