Published February 1996
| Version v1
Journal article
An ion source for solid elements with mechanical sputtering
Description
A description of an ion source for solid elements is given. The material from which an ion ought to be obtained, is mechanically sputtered and in the form of powder is dosed into an arc discharge chamber of the ion source. (Author)
Additional details
Publishing Information
- Journal Title
- Vacuum
- Journal Volume
- 47
- Journal Issue
- 2
- Journal Page Range
- p. 209-210.
- ISSN
- 0042-207X
- CODEN
- VACUAV
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 27043117
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ARC WELDING; ION IMPLANTATION; ION SOURCES; SOLIDS; SPUTTER-ION PUMPS; SPUTTERING
- Descriptors DEC
- EQUIPMENT; FABRICATION; JOINING; PUMPS; VACUUM PUMPS; WELDING