Published May 1992 | Version v1
Journal article Metadata-only

Formation of conducting structures on dielectric films surface by phase transformation method

Creators

Description

Theoretical study is made and possibility of obtaining conductor structures in dielectric layers by their local phase transformation under effect of electron irradiation is shown for superlarge integrated circuit production

Additional details

Additional titles

Original title (Russian)
Формирование проводящих структур на поверхности диэлектрических пленок методом фазовых превращений

Publishing Information

Journal Title
Fizika i Khimiya Obrabotki Materialov
Journal Issue
no.3
Journal Page Range
p. 73-79.
ISSN
0015-3214
CODEN
FKOMAT

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
24035496
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ANALYTICAL SOLUTION; COATINGS; DIELECTRIC MATERIALS; ELECTRONS; INTEGRATED CIRCUITS; PHASE TRANSFORMATIONS; RADIATION EFFECTS; SURFACES
Descriptors DEC
ELECTRONIC CIRCUITS; ELEMENTARY PARTICLES; FERMIONS; LEPTONS; MATERIALS