Published 1993
| Version v1
Book
Automated material interface (AMI) for mini-environment technology
Creators
Description
The Automated Material Inter-face or AMI presented here is a new method of automating the input/output of materials or products into mini-environments. The AMI concept and hardware, and preliminary data are presented to show that neither the automation hardware nor the product isolation carrier contribute any significant contamination to the product during the I/O process. Budgetary estimates are presented which support the AMI concept for cost effective manufacturing of advanced semiconductors and disk media
Additional details
Publishing Information
- Publisher
- Inst. of Environmental Sciences.
- Imprint Place
- Mount Prospect, IL (United States)
- ISBN
- 1-877862-19-3
- Imprint Title
- 1993 Proceedings volume 1--Contamination control; symposium on minienvironments; symposium on biocontamination control
- Imprint Pagination
- 642 p.
- Journal Page Range
- p. 506-512.
Conference
- Title
- 39. annual technical meeting of the Institute of Environmental Sciences.
- Dates
- 2-7 May 1993.
- Place
- Las Vegas, NV (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 25018292
- Subject category
- S42: ENGINEERING;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AUTOMATION; CLEAN ROOMS; COST; DESIGN; EQUIPMENT INTERFACES; FABRICATION; SEMICONDUCTOR DEVICES
Optional Information
- Secondary number(s)
- CONF-930529--.