Published 2018
| Version v1
Miscellaneous
Effect of ion irradiation on optical properties of aluminium and silicon nitride films
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Влияние ионного облучения на оптические свойства пленок нитридов алюминия и кремния
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLVIII International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 208 p.
- Journal Page Range
- p. 167
- Report number
- INIS-RU--619
Conference
- Title
- 48. international Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLVIII mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2018
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 52027265
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ALUMINIUM NITRIDES; EXPERIMENTAL DATA; INTERSTITIALS; ION BEAMS; KEV RANGE 100-1000; OPTICAL PROPERTIES; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; RADIATION HARDNESS; SILICON NITRIDES; THIN FILMS; VACANCIES
- Descriptors DEC
- ALUMINIUM COMPOUNDS; BEAMS; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DATA; DOSES; ENERGY RANGE; FILMS; INFORMATION; KEV RANGE; NITRIDES; NITROGEN COMPOUNDS; NUMERICAL DATA; PHYSICAL PROPERTIES; PNICTIDES; POINT DEFECTS; RADIATION EFFECTS; SILICON COMPOUNDS
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XLVIII mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami