Published March 1991
| Version v1
Journal article
High resolution channeling STIM in a thin crystal
Creators
- 1. Micro Analytical Research Centre, School of Physics, Univ. of Melbourne, Parkville (Australia)
Description
Scanning Transmission Ion Microscopy (STIM) has been combined with Channeling Contrast Microscopy (CCM) to examine damage in a thin crystal (4 μm thick Si) with high spatial resolution (200 nm). Such measurements require very low beam currents (<1 fA), whereas the crystal was damaged only by relatively large currents (nA). (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research, Section B
- Journal Volume
- 54
- Journal Issue
- 1-3
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 397-400
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 2. international conference on nuclear microprobe technology and applications.
- Dates
- 5-9 Feb 1990.
- Place
- Melbourne (Australia).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 22074138
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM CURRENTS; HYDROGEN IONS 1 PLUS; ION MICROSCOPY; KEV RANGE 100-1000; MONOCRYSTALS; PROTON BEAMS; PROTON CHANNELING; SILICON; SPATIAL RESOLUTION; THICKNESS; TRANSMISSION
- Descriptors DEC
- BEAMS; CATIONS; CHANNELING; CHARGED PARTICLES; CRYSTALS; CURRENTS; DIMENSIONS; ELEMENTS; ENERGY RANGE; HYDROGEN IONS; IONS; KEV RANGE; MICROSCOPY; NUCLEON BEAMS; PARTICLE BEAMS; RESOLUTION; SEMIMETALS