Drilling Process of Ceramic Using Nanosecond Nd: Yag Laser

Laser micromachining is preferred technique for hard materials such as metals, ceramics, and composites. Ceramics are used extensively in the microelectronics industry and scribing and hole drilling processes using short pulse lasers provides high quality results. In this study, the effects of laser wavelength and ambient pressure were examined on the craters of the alumina ceramic using nanosecond Nd:YAG laser. Experimental studies were performed with pulse duration of 6ns and with different wavelength (532, 355 nm) at different ambient pressure (vacuum and atmospheric) and frequencies. The thicknesses of the alumina ceramic plates are 800μm