To the role of positive ions in plasma nitridation

A method similar to that of determining the asymmetric component f1 of electron distribution function was used to prove whether the nitrogen ions produced in a discharge may be those particles which directly influence magnesium nitridation in a glow discharge. The amount of created magnesium nitride on surfaces facing the anode and the cathode and positive ion current flowing into the plane double probe were measured. It follows from experimental results that positive ions from bulk plasma are not decisive for nitride formation. (author)