Structure and properties of materials gained in the result of powerful ion and electron beams interaction

The processes of mixing, mass transfer in multilayer covers deposited on metallic substrate under irradiation by powerful particle flux have been analyzed. Formation of point defects both the vacancy and the interstitial types, segregation processes and generation of dislocation structure placed on the depth from surface (zone of beam interaction) have been studied. It is shown, that main criterion at powerful ion and electron beams interaction is energy density, brought into a depth unit, pulse duration and number of pulses