Published June 30, 1989
| Version v1
Patent
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Method for preparation of NbO2 films
Creators
Description
A method of preparation of epitaxial films of NbO2, consisting in niobium evaporation in the atmosphere of oxygen and its deposition on sublayer of fluorophlogopite or aluminium oxide, when it is heated up to 1050-1150 K and oxygen pressure is 1x10-5-3x10-4 tors, is described. NbO2 films possess thermal stability in the process of heating up to 1150 K. 1 tab
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Additional details
Additional titles
- Original title (Russian)
- Способ получения пленок NbO
Publishing Information
- Imprint Pagination
- 6 p.
- IPC:
- Int. Cl. C30B 23/02; 29/16.
- IPC
- Int. Cl. C30B 23/02; 29/16.
- Patent number
- SU patent document 1490167/A1/
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 22021897
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- EPITAXY; FILMS; HIGH VACUUM; NIOBIUM OXIDES; SENSITIVITY; SUBSTRATES; THERMAL DEGRADATION; VERY HIGH TEMPERATURE
- Descriptors DEC
- CHALCOGENIDES; NIOBIUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Secondary number(s)
- SU patent application 4198957/23-26.