Annealing studies with ionizing, non-ionizing and combined radiation irradiated Monolithic Active Pixel Sensors

CMOS Monolithic Active Pixel Sensors (MAPS) provide an outstanding combination of excellent spatial resolution (few μ m) and very light, thin (<0.05 % X0) material budget. Their use is foreseen in the vertex detectors of various experiments in heavy ion and particle physics. Among them is CBM. In order to handle the harsh radiation doses expected in this experiment the CBM-MVD collaboration undertakes intense R and D on the radiation hardness of MAPS. In this context, we performed for a first time a systematic annealing study for MAPS being irradiated with X-rays, neutrons and a combination of both. The results are presented, and the feasibility of regenerating an irradiated CBM vertex detector by means of thermo cycling is discussed.