Published March 2002
| Version v1
Report
Atomic and molecular emission spectroscopy in low temperature plasmas containing hydrogen and deuterium
Description
In this thesis plasma diagnostics by emission spectroscopy is reviewed. Considered are He, Ar, H2, D2, CH4, silane, N2, and O 2 plasmas. (HSI)
Availability note (English)
Available from TIB Hannover: RA 71(10/21)Additional details
Publishing Information
- Imprint Pagination
- 194 p.
- Report number
- IPP--10/21
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 33018445
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Thesis, Progress Report, Non-conventional Literature
- Descriptors DEI
- ARGON; ATOMS; DEUTERIUM; EMISSION SPECTROSCOPY; HELIUM; HYDROGEN; METHANE; MOLECULES; NITROGEN; OXYGEN; PLASMA DIAGNOSTICS; PROGRESS REPORT; REVIEWS; SILANES
- Descriptors DEC
- ALKANES; DOCUMENT TYPES; ELEMENTS; FLUIDS; GASES; HYDRIDES; HYDROCARBONS; HYDROGEN COMPOUNDS; HYDROGEN ISOTOPES; ISOTOPES; LIGHT NUCLEI; NONMETALS; NUCLEI; ODD-ODD NUCLEI; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; RARE GASES; SILICON COMPOUNDS; SPECTROSCOPY; STABLE ISOTOPES