Published November 5, 2012 | Version v1
Journal article Metadata-only

Nano-craters due to impact of individual highly charged ions on surfaces and thin films

Creators

  • 1. Institute of Applied Physics, TU Wien - Vienna University of Technology, 1040 Vienna (Austria)
  • 2. Max-Planck-Institut für Kernphysik, 69117 Heidelberg (Germany)
  • 3. Helmholtz-Zentrum Dresden-Rossendorf, 01314 Dresden (Germany)
  • 4. Faculty of Physics, Cath. University of Rio Grande do Sul, 90619-900 Porto Alegre (Brazil)
  • 5. IMS Nanofabrication AG, 1020 Vienna (Austria)

Description

We present a systematic study on nano-crater formation due to impact of individual slow highly charged ions (Xe20+ − Xe50+) on thin polymethyl-metacrylate films, which have been spin-coated on a Si-wafer.

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/388/13/132028

Additional details

Identifiers

DOI
10.1088/1742-6596/388/13/132028;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
388
Journal Issue
13
Journal Page Range
[1 p.]
ISSN
1742-6596

Conference

Title
27. international conference on photonic, electronic and atomic collisions
Acronym
ICPEAC 2011
Dates
27 Jul - 2 Aug 2011
Place
Belfast, Northern Ireland (United Kingdom)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44033649
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CRATERS; MULTICHARGED IONS; NANOSTRUCTURES; PMMA; SILICON; SPIN; SURFACES; THIN FILMS; XENON IONS
Descriptors DEC
ANGULAR MOMENTUM; CAVITIES; CHARGED PARTICLES; ELEMENTS; ESTERS; FILMS; IONS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PARTICLE PROPERTIES; POLYACRYLATES; POLYMERS; POLYVINYLS; SEMIMETALS