Published July 1977
| Version v1
Journal article
Upper bound to the outgassing rate of metal surfaces
Description
An upper bound to the outgassing rate of low-surface-area metal surfaces after an atmospheric exposure is deduced from a recently derived model. The result is Q/sub max/=1.72 x 10-5/t (Torr l)/(s cm2) where t is in seconds. Comparisons of outgassing data with this estimate are made for (1) various low-surface-area materials, (2) a given surface at elevated temperatures, and (3) a variation in the real pumping speed for a particular surface. Q/sub max/ has been found to be an upper bound to the outgassing data under a variation of the above parameters provided that the material is operated at approximately-less-than100degreeC for times between 15 min and 7 days
Additional details
Identifiers
- DOI
- 10.1116/1.569315;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology
- Journal Volume
- 14
- Journal Issue
- 4
- Series
- J. Vac. Sci. Technol.
- Journal Page Range
- 1030-1032
- ISSN
- 0022-5355
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 9352367
- Subject category
- S42: ENGINEERING;
- Descriptors DEI
- ADSORPTION; CARBON MONOXIDE; COPPER; CRYOPUMPS; DEGASSING; DESORPTION; HYDROGEN; KINETICS; MASS SPECTROSCOPY; METALS; STAINLESS STEELS; SURFACES; TEMPERATURE DEPENDENCE; VACUUM SYSTEMS; WATER VAPOR
- Descriptors DEC
- ALLOYS; CARBON ADDITIONS; CARBON COMPOUNDS; CARBON OXIDES; CHALCOGENIDES; CHROMIUM ALLOYS; CORROSION RESISTANT ALLOYS; ELEMENTS; FLUIDS; GASES; IRON ALLOYS; IRON BASE ALLOYS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PUMPS; SPECTROSCOPY; STEELS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENTS; VACUUM PUMPS; VAPORS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent