Regrowth and compound formation by pulsed ion beams

Experiments using pulsed protons or beams of heavier ions are described and reviewed. Ion pulses were produced by magnetically insulated diodes driven by Marx bank generators. The quality of the beam has also been analyzed showing appreciable proportions of impurities (carbon, oxygen, metals). Implantation amorphized layers were recrystallized by LPE mechanisms. Surface layers of amorphous metals were modified. Formation of silicides was demonstrated. Heavier ion pulses increase temperature gradients, thus give higher regrowth rates. Advantages and disadvantages of the technique are analyzed. (author)