Published June 2006 | Version v1
Journal article

Depth-dependent elastic strain in ZnO/Zn0.9Mg0.1O/ZnO heterostructure studied by rutherford backscattering/channeling

  • 1. Beijing Univ., Beijing (China). School of Physics
  • 2. Chinese Academy of Sciences, Beijing (China). Inst. of Physics, State Key Laboratory for Surface Physics

Description

ZnO/Zn0.9Mg0.1O/ZnO heterostructure was grown by radio frequency plasma-assisted molecular beam epitaxy on a sapphire (0001) substrate. By using RBS/C, the depth-dependent elastic strain was deduced. The strain changes from negative to positive from interface to surface, and the value is higher at the depth close to the interface (also at the interface between ZnO and Zn0.9Mg0.1O) and decreases towards the surface. The negative tetragonal distortion was explained by considering the lattice mismatch and thermal mismatch between ZnO and sapphire substrate, and the positive distortion is due to the tensile strain in the parallel direction of Zn0.9Mg0.1O and the gradual release of the strain. (authors)

Additional details

Publishing Information

Journal Title
Acta Physica Sinica
Journal Volume
55
Journal Issue
6
Journal Page Range
p. 2892-2896
ISSN
1000-3290

Optional Information

Notes
5 figs., 1 tab., 13 refs.