Published 1992
| Version v1
Journal article
Plasma heating in low pressure RF discharges
- 1. Oxford Univ. (United Kingdom). Dept. of Engineering Science
- 2. Open Univ., Milton Keynes (United Kingdom)
Description
In the present paper we consider the interaction of electrons with an oscillating sheath as a possible mechanism for plasma heating in low pressure radiofrequency discharges. The heating rate is found to be considerable and exceeds the rate of the energy loss due to electrons escaping across the sheath and recombining on the electrode surface. (author) 5 refs., 4 figs
Additional details
Publishing Information
- Journal Title
- Europhysics Conference Abstracts
- Journal Volume
- 16C
- Journal Issue
- Part III
- Journal Page Range
- p. III-1973-III-1976.
- ISSN
- 0378-2271
- CODEN
- ECABDW
Conference
- Title
- 1992 international conference on plasma physics.
- Dates
- 29 Jun - 3 Jul 1992.
- Place
- Innsbruck (Austria).
INIS
- Country of Publication
- Switzerland
- Country of Input or Organization
- Switzerland
- INIS RN
- 26051619
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- BOLTZMANN STATISTICS; ELECTRONS; HEATING RATE; INTERACTIONS; LOW PRESSURE; OSCILLATIONS; PLASMA HEATING; PLASMA SHEATH; RF SYSTEMS; THEORETICAL DATA
- Descriptors DEC
- DATA; ELEMENTARY PARTICLES; FERMIONS; HEATING; INFORMATION; LEPTONS; NUMERICAL DATA