Low Energy Ga Ion Beams Bombardment onside Insulating Materials and X-ray Emission

X-ray spectra from the surface of insulating samples were measured using a 30 kV Ga+ focused ion beam instrument equipped with an energy dispersive X-ray spectrometer, showing an intense emission of low energy X-rays from insulating materials such as Al-K and O-K of Al2O3. This low energy ion induced X-ray emissions (LIIXE) from insulating materials is expected as a new analytical technique for light elements in insulating samples. It was found that X-ray yield induced by Ga+ ion beam irradiation depends on the incident beam energy. It was also found that high voltage of a secondary electron detector located near the sample strongly influences the intensity of X-ray emission, implying that bombardment of electrons, which may come from the chamber wall, onside the sample surface is a key phenomenon for the X-ray emissions