Quantitative thermal desorption spectrometry of ionically implanted inert gases

Experimentally, quantitative thermal desorption spectrometry requires that a well characterized sample be subjected to specified ion bombardments, heated in an accurately defined temperature-time profile, and the resulting gas desorption rate measured with the highest available sensitivity. This paper discusses the main considerations affecting the design of the sample, its heating equipment, the ion gun and the partial pressure detector to meet these requirements. It was shown in the preceding paper that the system sensitivity and background leak rate are the only apparatus parameters affecting the accuracy with which kinetic parameters (binding energy, frequency factor, reaction order) can be derived from the data. Approximate limits to the achievable values of these two parameters are given. The required properties of the data acquisition system and the data treatment and analysis procedures are also outlined. Some experimental examples are given to illustrate the quantitative accuracies that can be attained. (author)