Published 2004
| Version v1
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New modified source of hydrogen ions for proton implantation into semiconducting plates for purpose of multilayer structure obtaining
Creators
- 1. Moskovskij Inzhenerno-Fizicheskij Inst. (Gosudarstvennyj Univ.), Moscow (Russian Federation)
- 2. Moskovskij Ehlektronnoj Tekhniki (Tekhnicheskij Univ.), Moscow (Russian Federation)
- 3. FGUP GNTs RF Inst. Teoreticheskoj i Ehksperimental'noj Fiziki, Moscow (Russian Federation)
Description
no abstract available
Files
36107240.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Новый модифицированный источник водорода для имплантации протонов в полупроводниковые пластины с целью создания многослойных структур
Publishing Information
- Publisher
- Izdatel'stvo UNTs DO
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of the XXXIV International conference on physics of charged particle-crystal interactions
- Imprint Pagination
- 168 p.
- Journal Page Range
- p. 132
- Report number
- INIS-RU--491
Conference
- Title
- 34. International conference on physics of charged particle-crystal interactions
- Original Conference Title
- XXXIV mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 31 May - 2 Jun 2004
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 36107240
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ATOMIC IONS; HYDROGEN IONS; ION IMPLANTATION; ION SOURCES; LINEAR ACCELERATORS; PERFORMANCE; SILICON
- Descriptors DEC
- ACCELERATORS; CHARGED PARTICLES; ELEMENTS; IONS; SEMIMETALS
Optional Information
- Notes
- 2 refs. Imprint:Tezisy dokladov XXXIV mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami