Published 2003
| Version v1
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Production of Cr- and Zr-based metal-containing coatings on silicon under ion assistance conditions
Creators
- 1. Belorusskij Gosudarstvennyj Tekhnologicheskij Univ., Minsk (Belarus)
Description
no abstract available
Files
36016317.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Формирование на кремнии металлосодержащих покрытий на основе Cр и Зр в условиях ионного ассистирования
Publishing Information
- Publisher
- Izdatel'stvo UNTs DO
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Abstracts of reports of the 33. International conference on physics of charged particle - crystal interaction
- Imprint Pagination
- 162 p.
- Journal Page Range
- p. 142
- Report number
- INIS-RU--484
Conference
- Title
- 33. International conference on physics of charged particle - crystal interaction
- Original Conference Title
- 33. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 26-28 May 2003
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 36016317
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- CHROMIUM IONS; DEPTH; ELECTRIC ARCS; INTERFACES; ION BEAMS; MASS SPECTROSCOPY; OXIDES; QUANTITATIVE CHEMICAL ANALYSIS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SPATIAL DISTRIBUTION; THIN FILMS; VACUUM COATING; ZIRCONIUM IONS
- Descriptors DEC
- BEAMS; CHALCOGENIDES; CHARGED PARTICLES; CHEMICAL ANALYSIS; CURRENTS; DEPOSITION; DIMENSIONS; DISTRIBUTION; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELEMENTS; FILMS; IONS; OXYGEN COMPOUNDS; SEMIMETALS; SPECTROSCOPY; SURFACE COATING
Optional Information
- Notes
- Imprint:Tezisy dokladov 33. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami