Ion implantation in insulators

The modification of insulating materials by ion implantation is developing in several areas. In many cases the property changes just parallel those observed in semiconductors, but in at least one new area, namely integrated optics, the use of the ion beams has distinct advantages for the control of the properties needed for waveguides and other optical devices. Ion beams also fill a second function as diagnostic tools in the production and analysis of defect structures. A selection of experiments using luminescence and optical absorption are mentioned. (orig.)