Published May 1986 | Version v1
Journal article Metadata-only

Vacuum niobium condensates produced by sputtering of target with accelerated Nb ions

Creators

Description

A possibility to produce metal films and coatings by sputtering of a target by ions of cold cathode vacuum arc plasma is investigated. Such films are characterized by a fine grain structure and raised adhesion to a substrate in comparison with niobium films produced by thermal evaporation under similarconditions

Additional details

Additional titles

Original title (Russian)
Вакуумные конденсаты ниобия, полученные распылением мишени ускоренными ионами Нб

Publishing Information

Journal Title
Fiz. Khim. Obrab. Mater.
Journal Issue
no.3
Series
Fiz. Khim. Obrab. Mater.
ISSN
0015-3214
CODEN
FKOMA

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
18031123
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Descriptors DEI
ADHESION; FILMS; GRAIN SIZE; ION BEAMS; MICROSTRUCTURE; NIOBIUM; NIOBIUM IONS; PHYSICAL RADIATION EFFECTS; PLASMA ARC SPRAYING; SPRAYED COATINGS; TARGETS
Descriptors DEC
ATOMIC IONS; BEAMS; CHARGED PARTICLES; COATINGS; CRYSTAL STRUCTURE; DEPOSITION; ELEMENTS; IONS; METALS; RADIATION EFFECTS; SIZE; SPRAY COATING; SURFACE COATING; TRANSITION ELEMENTS