Published November 10, 1972
| Version v1
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Ion implantation using nuclear reactions
Description
no abstract available
Availability note (English)
MF available from INIS under the Report Number.Files
4073116.pdf
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(195.6 kB)
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Additional details
Additional titles
- Original title (French)
- Utilisation des reactions nucleaires pour l'implantation ionique
Publishing Information
- Imprint Pagination
- 11 p.
- Report number
- CEA-CONF--2246
Conference
- Title
- Colloquium on the physicochemical and electrical properties of semiconductor materials and the manufacturing process for these materials.
- Dates
- 27 Sep 1972.
- Place
- Grenoble, France.
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 4073116
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; S07: ISOTOPES AND RADIATION SOURCES;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACTIVATION ANALYSIS; ALPHA PARTICLES; BORON; DISTRIBUTION; DOPED MATERIALS; ION IMPLANTATION; NUCLEAR REACTIONS; PROTON BEAMS; SEMICONDUCTOR MATERIALS; SILICON; SURFACES
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; ELEMENTS; NUCLEON BEAMS; PARTICLE BEAMS; SEMIMETALS
Optional Information
- Secondary number(s)
- CEA-LETI-ME--882.