Study of the diamond and diamond like films formation and technology development for the films precipitation on solid surface for wear resistance increasing of tools, machine and mechanism parts

Purpose of the project: The purpose of the project is a development and a creation of an effective technology of the diamond and diamond like films precipitation on materials, including refractory metals, semiconductors and composite on the carbon fibers base. The study method includes the experimental investigation of the base surface structure and properties, preparation of the surface for diamond and diamond like coats growing. The precipitation of above mentioned films will be carried out from the plasma being formed from carbon gas medium at low pressure. The main purposes of the project are: - development of the technology for obtaining the films with specified properties; provision of required rate -of the precipitation; - decreasing of temperature; - manufacturing of the functioning laboratory stand with further developing of a pilot- - commercial plant for diamond and diamond like coating. It is supposed to develop a method of the monocrystal diamond films growing, that are useful for semiconductor devices manufacturing The methods: A thermo-emission and ECR methods will be used for investigation of the diamond and diamond like films formation and growth processes. The plant that will be used for the first method is a two electrode construction. Refractory metals (W,Re) being heated up to 2500 Kelvin degrees, are usually used as an actuating electrode. The second one is a base on which the precipitation is carrying out. Refractory metals, steel, silicon can be used as the base. Actuating medium is a mixture of carbon and inert gases. The second method is based on a principle of a plasma formation with use of 2.45 GHz Shf radiation power. An ECR-plasma is formed in conjunction with magnetic field in the actuating chamber. This method allows to precipitate high quality films at lower pressure. Expected results: The main purpose of the project is to assimilate the high effective technology of the diamond and diamond like films precipitation on different materials, including refractory metals and alloys, semiconductors and composites based on carbon fibers. After the developing of the technology that provides to obtain the films with specified properties and required rate of precipitation, it is supposed to create a pilot-commercial plant for machine and mechanism parts coating and wear resistance tools manufacturing