Published September 1993 | Version v1
Journal article

Installation, adjustment and aberration control of a scanning proton microprobe

  • 1. Academia Sinica, Shanghai, SH (China). Shanghai Inst. of Nuclear Research

Description

A method to install and adjust the scanning proton microprobe at SINR was described. The resolution of the SPM was improved and reached 2-3 μm for 3 MeV H+ and 2 MeV He+ beams at a current intensity of 100 pA by the aberration control

Additional details

Publishing Information

Journal Title
Nuclear Techniques
Journal Volume
16
Journal Issue
9
Journal Page Range
p. 526-530.
ISSN
0253-3219
CODEN
NUTEDL