Published 1986 | Version v1
Book

X-ray structural diagnostics for investigation of monocrystal near surface layers

Description

Main conceptions on X-ray diffraction physics aimed at creating methods for crystal structure analysis of thin presurface layers and crystal interphases of high degree of perfection, and firstly of semiconductor crystals being the basis for modern microelectronics, are presented

Additional details

Additional titles

Original title (Russian)
Рентгеновская структурная диагностика в исследовании приповерхностных слоев монокристаллов

Publishing Information

Publisher
Nauka.
Imprint Place
Moscow (USSR)
Imprint Pagination
96 p.

Optional Information

Notes
25 refs.; 36 figs.