Published May 1987
| Version v1
Journal article
Carbon coating due to electron cyclotron resonance plasma, 2
- 1. Institute of Physical and Chemical Research, Wako, Saitama (Japan)
Description
Published in summary form only
Additional details
Publishing Information
- Journal Title
- Shinku
- Journal Volume
- 30
- Journal Issue
- 5
- Series
- Shinku.
- Journal Page Range
- 299-303
- ISSN
- 0559-8516
- CODEN
- SHINA
Conference
- Title
- 27. vacuum symposium.
- Dates
- 12-14 Nov 1986.
- Place
- Osaka (Japan).
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 19026910
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- CARBON; ELECTRON CYCLOTRON-RESONANCE; FIRST WALL; METHANE; PLASMA; SURFACE COATING; THERMONUCLEAR REACTOR MATERIAL
- Descriptors DEC
- ALKANES; CYCLOTRON RESONANCE; DEPOSITION; ELEMENTS; HYDROCARBONS; MATERIALS; NONMETALS; ORGANIC COMPOUNDS; RESONANCE; THERMONUCLEAR REACTOR WALLS