Effect of an absorbed layer on the laws governing sputtering of a copper monocrystal

On the basis of approximatior of the twin elastic interaction of atoms computer calculations were made for allowance for the effect of Cs adsorbed layer on the laws governing sputtering of Cu (100) single crystal. The calculations were made by means of a square-law approximation of Firsov potential at small r0 and Born-Mayer potential at large R0. It was established that in the case of a large amount of adatoms on the surface energy distribution consisted mainly of particles escaped from an adsorbed layer. A sputtering coefficient increased in a monotonous way with rise in coverage, and when achieving 70% of a monolayer passed through a maximum