Published July 7, 2014
| Version v1
Journal article
Raman scattering in Si/SiGe nanostructures: Revealing chemical composition, strain, intermixing, and heat dissipation
- 1. Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, New Jersey 07102 (United States)
- 2. National Research Council, Ottawa, Ontario K1A 0R6 (Canada)
Description
We present a quantitative analysis of Raman scattering in various Si/Si1-xGex multilayered nanostructures with well-defined Ge composition (x) and layer thicknesses. Using Raman and transmission electron microscopy data, we discuss and model Si/SiGe intermixing and strain. By analyzing Stokes and anti-Stokes Raman signals, we calculate temperature and discuss heat dissipation in the samples under intense laser illumination.
Additional details
Identifiers
- DOI
- 10.1063/1.4886598;
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 116
- Journal Issue
- 1
- Journal Page Range
- p. 014305-014305.10
- ISSN
- 0021-8979
- CODEN
- JAPIAU
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 46012424
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Descriptors DEI
- COOLING; ENERGY LOSSES; GERMANIUM SILICIDES; HEAT TRANSFER; LAYERS; NANOSTRUCTURES; RAMAN EFFECT; SILICON; STRAINS; THERMAL DIFFUSIVITY; THERMAL EFFLUENTS; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY
- Descriptors DEC
- DIMENSIONS; ELECTRON MICROSCOPY; ELEMENTS; ENERGY TRANSFER; GERMANIUM COMPOUNDS; LOSSES; MICROSCOPY; PHYSICAL PROPERTIES; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; THERMODYNAMIC PROPERTIES
Optional Information
- Notes
- (c) 2014 AIP Publishing LLC