Published May 14, 1987
| Version v1
Journal article
A comparison of two-dimensional ion-implantation profiles
Description
It has been suggested by two independent groups of workers that two-dimensional ion-implantation profiles can be constructed from one-dimensional projections (marginal distribution functions). However, the types of projections used by the two sets of workers are different and in the present paper the two methods are compared and their limitations investigated. (author)
Additional details
Publishing Information
- Journal Title
- J. Phys., D
- Journal Volume
- 20
- Journal Issue
- 5
- Series
- J. Phys., D.
- Journal Page Range
- 642-646
- ISSN
- 0022-3727
- CODEN
- JPAPB
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 18077676
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- ANALYTICAL SOLUTION; BOLTZMANN EQUATION; COMPARATIVE EVALUATIONS; DEPTH; DISTRIBUTION FUNCTIONS; ION IMPLANTATION; MONTE CARLO METHOD; NUMERICAL DATA; TWO-DIMENSIONAL CALCULATIONS
- Descriptors DEC
- DATA; DIFFERENTIAL EQUATIONS; DIMENSIONS; EQUATIONS; EVALUATION; INFORMATION; PARTIAL DIFFERENTIAL EQUATIONS