Published October 14, 1981 | Version v1
Journal article Metadata-only

Rutherford back-scattering and ellipsometry of selenium implanted InP

Creators

  • 1. Surrey Univ., Guildford (UK). Dept. of Electronic and Electrical Engineering

Description

Good correlation has been found between disorder, measured by Rutherford back-scattering and the extinction coefficient obtained from ellipsometry measurements for 200 keV selenium ions implanted up to a dose of 1 x 1015 cm-2 at room temperature. Both techniques show that InP becomes amorphous for doses greater than 5 x 1013 Se+ cm-2. The magnitude of the reflectivity, refractive index and extinction coefficient, obtained from ellipsometry, are presented as a function of dose. (author)

Additional details

Publishing Information

Journal Title
J. Phys., D (London). Appl. Phys.
Journal Volume
14
Journal Issue
10
Series
J. Phys., D (London). Appl. Phys.
Journal Page Range
1915-1922
ISSN
0022-3727

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
13651808
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Numerical Data
Descriptors DEI
AMORPHOUS STATE; BACKSCATTERING; CATIONS; DOSE-RESPONSE RELATIONSHIPS; EXPERIMENTAL DATA; INDIUM PHOSPHIDES; ION IMPLANTATION; KEV RANGE 100-1000; MEDIUM TEMPERATURE; POLARIZATION; REFLECTION; REFRACTIVE INDEX; RUTHERFORD SCATTERING; SELENIUM IONS
Descriptors DEC
ATOMIC IONS; CHARGED PARTICLES; DATA; ELASTIC SCATTERING; ENERGY RANGE; INDIUM COMPOUNDS; INFORMATION; IONS; KEV RANGE; NUMERICAL DATA; OPTICAL PROPERTIES; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING